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KMID : 1011420190240040447
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Journal of Korean Ophthalmic Optics Society
2019 Volume.24 No. 4 p.447 ~ p.454
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Design of Telecentric F-theta Lens for 532 nm Wavelength Laser
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Park Seung-Hwan
Kim Sun-Dong
Lee Dong-Hee
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Abstract
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Purpose: In this study, a telecentric F-theta lens is designed for a 532 nm wavelength laser.
Methods: To design the telecentric F-theta lens for satisfying the user's conditions, the following parameters are noted: the diameter of the laser beam does not exceed 11 mm, the spot diameter of the imaging point is no more than 10 μm, the thickness of the optical system does not exceed 112 mm, the working distance is approximately 197 mm, and the diagonal length of the effective imaging square is not less than 111 mm. We used a method of gradual optimization while increasing the number of lenses, starting from the configuration of two lenses with (?, +) refractive powers and applying the user conditions mentioned above as the constraint conditions upon separating the two X Y galvanomirror driving angles into nine states.
Results: The optimized telecentric F-theta lens consists of six lenses wherein the symbols of the refractive powers are in the order (?, +, ?, +, +, +), and the compositions of materials are in the order (NLAF2, NLAF2, NSF4, NLAF2, NLAK12, NSK16). This system has a line width resolution of 50.0 lps/mm (@ 30% MTF value), focal length of approximately 162.7 mm, working distance of 197.0 mm, area of the effective image plane of approximately 78.7 × 78.7 mm2, and maximum galvanomirror driving angle of ± 6.93o.
Conclusions: In this study, we developed a telecentric F-theta lens with EFL of 162.7 mm by dividing the combination of two galvanomirror driving angles into nine states and by using the method of minimizing the finite ray aberrations and the telecentricities of the principal rays in these nine states. The developed lens can be applied in through-hole making machines, laser marking machines, and 3D printing equipments, etc.
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KEYWORD
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532 nm wavelength laser, F-theta lens, Through-hole making machine, 3D printing, Telecentricity
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